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Self-Assembled Monolayers for Phosphorus Doping of Silicon for Field Effect Devices

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Figure

Figure 1.3. Sheet resistance measured as a function of anneal time and temperature for DPP dopedsamples, inset shows SIMS profile.5
Figure 1.4. (a) Schematic of MLD-doped Si nanowire resistors. (b) Current vs. voltage of MLD-dopedand undoped Si nanowire resistors.5
Figure 1.5. SIMS profile of DVP-doped samples with different fractions of DVP in the solution.6 Black,red, blue, magenta, and green lines correspond to 100%, 10%, 3%, 1%, and 0.1% fraction of DVP(curve with highest concentration is black, and concentrations decrease in order listed to green withthe lowest concentration).
Figure 1.6. Sheet resistance measured as a function of anneal time and temperature for DPP dopedsamples at RIT.1
+7

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