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3D characterisation of indentation induced sub-surface cracking in silicon nitride using FIB tomography

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Figure

Fig. 1. (a) An SEM image with the 52° tilt showing a FIB milled cross-section adjacent to the indentation on the surface
Fig. 2. Optical images in both bright field (top) and dark field (bottom) modeshowing one of the 1 kg SN-1 indentations (a) before polishing (b) after thetenth increment of polishing, and (c) a schematic of where each image is inlocation to depth (top), as well as the dark field image after the twentieth in-crement.
Fig. 3. SEM imaged cross-sections of the 1 kg SN-1 FIB-milled indentation taken at a tilt angle of 52°
Fig. 6. Crack maps created using IMOD overlaid onto SEM images taken at a 52° tilt angle for the SN-2 (a) 1 kg indentation and (b) 0.5 kg indentation
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