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Energy resolved actinometry for simultaneous measurement of atomic oxygen densities and local mean electron energies in radio-frequency driven plasmas

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Figure

Figure 2(a) shows the effective excitation ratio of the
FIG. 2. Simulated effective excitationratios for (a)simulated ratios are significantly influ- E�844=E�750, (b) E�777=E�750,and (c) overlay of both excitationratios over a range of dissociation frac-tions (0%–5%) and mean electronenergies (3 eV–6 eV)
FIG. 5. Local mean electron energy as a function of power (squares, 1 slmHe, 0.5% O2, 0.1% Ar) and O2 admixture (circles, 1 slm He, 0.1% Ar,P ¼ 10 W).

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