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Repressing oxidative wear within Si doped DLCs

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Figure

Table 1 Literature showing the Si content's effect on the DLCs
Table 2 Coating hardness values as obtained by nano indentation testing
Figure 2 Optical microscopy imaging of worn area (a) a-C:H, (b) Si,O-DLC, (c) Si,O,F-DLC
Figure 3 contact profilometry results of the coatings, a-C:H (a), Si,O (b) and Si,O,F (c) confirming the lower wear track depth of the Si,O,F doped sample (0.2 �m)
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