• No results found

Aluminum nitride films by reactive sputtering

N/A
N/A
Protected

Academic year: 2019

Share "Aluminum nitride films by reactive sputtering"

Copied!
106
0
0

Loading.... (view fulltext now)

Full text

Loading

Figure

Table 1-1Some Physical Properties of AlN
Figure 1-1Zinc blende (top) and wurtzite (bottom)crystals.7
Table 2-2Summary ofP-E 2400 Sputtering Parameters.
Figure 2-2The Frequency dependence of the three Components ofPolarization/
+7

References

Related documents

Average Administrative Fee per WSE Average WSE Wage Health Insurance Program WC Program Risk Management Technology Platform Quality of HR Services Productivity of Sales

Donc le rejet de ce déchet dans l’environnement conduit à un risque potentiel de dissolution de ces éléments dans les eaux pluviales ou les cours d’eau

The measured far-field E -plane and H -plane radiation patterns at the resonance frequency are presented in Figure 4, whereas Figure 5 displays the measured 3D radiation

The diagnosis of employee anomie using the 3AP model allows for finding its source, which may be the result of a simultaneous operation of all three factors or a combination of

La ragione sottesa alla scelta di voler intraprendere un breve percorso di comparazione diacronica sta nel voler tentare di chiarire un equivoco sedimentato in parte della dottrina

It would also be interesting to study the complexity of computing optimal conflict-free colorings for subhypergraphs of other geometric hypergraphs, like the hypergraph induced by

We show how one can decompose an arbitrary regular subset of a finite rank free group into disjoint union of sets accepted by special automata or special monoids.. These automata