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3 D Design and Analysis of Functional NEMS gate MOSFETs and SETs

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Figure

Fig. 1. Schematic of a conventional metal–metal capacitor.
Fig. 3. MOS-NEMS membrane actuation for various parameters: initialair-gap t, area A, thickness t.
Fig. 5. Reproduction of the theoretical model using the equivalent spring con-stant (solid line) with the initial 3-D simulated results (dotted line).
Fig. 8. I
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