An Etching Study for Self-Aligned Double Patterning
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![Figure 2.3:SADP simplified flow [26]](https://thumb-us.123doks.com/thumbv2/123dok_us/32528.2580/21.612.258.388.70.116/figure-sadp-simplied-ow.webp)
![Figure 2.7: Plasma reaction mechanisms [35]](https://thumb-us.123doks.com/thumbv2/123dok_us/32528.2580/24.612.108.541.72.282/figure-plasma-reaction-mechanisms.webp)
![Figure 2.11: Film growth mechanisms [36]](https://thumb-us.123doks.com/thumbv2/123dok_us/32528.2580/28.612.240.411.297.439/figure-film-growth-mechanisms.webp)
![Figure 2.12: A Gibbs energy vs Temperature curve for the formation of various oxides [36].](https://thumb-us.123doks.com/thumbv2/123dok_us/32528.2580/30.612.220.426.76.397/figure-gibbs-energy-temperature-curve-formation-various-oxides.webp)
![Figure 2.13: Normalized Gas flow lines(left) over the range of 0-1 and isotherms in K(right)for varying Reynolds and Grashof numbers for a vertical reactor design [36,37].](https://thumb-us.123doks.com/thumbv2/123dok_us/32528.2580/31.612.175.472.72.332/figure-normalized-isotherms-varying-reynolds-grashof-vertical-reactor.webp)
![Figure 2.16:Ion bombardment energy by pressure [42].](https://thumb-us.123doks.com/thumbv2/123dok_us/32528.2580/35.612.152.495.72.336/figure-ion-bombardment-energy-by-pressure.webp)
![Figure 2.17:Possible effects of RIE [51,52].](https://thumb-us.123doks.com/thumbv2/123dok_us/32528.2580/38.612.154.490.71.336/figure-possible-eects-of-rie.webp)
![Figure 2.18:Feature size specifications for etching as described by equation 2.18 [42].](https://thumb-us.123doks.com/thumbv2/123dok_us/32528.2580/39.612.205.471.357.645/figure-feature-size-specications-etching-described-equation.webp)
![Figure 2.19:Feature shrink due to mask erosion as depicted by equation 2.22 [42].](https://thumb-us.123doks.com/thumbv2/123dok_us/32528.2580/40.612.157.545.247.555/figure-feature-shrink-mask-erosion-depicted-equation.webp)
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