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Preparation of high-quality planar FeRh thin films for in situ TEM investigations

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Academic year: 2019

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Figure

Figure 1 (a,b) SEM images showing (a) front-; and (b) back-side views of the FeRh thin film, MgO substrate and protective Pt layer
Figure 2  (a) 3D model showing the positioning of the MEMS chip and heating coil (inset), on the custom-designed SEM stub with 45° faces

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