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Charge Storage Characteristics of Pi-Gate Poly-Si Nanowires TaN-Al2O3-Si3N4-SiO2-Si Flash Memory

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Figure

Figure 1. (a) Top view scheme of the Pi-gate NWs TANOS NVM. (b) Cross-section scheme of TANOS device along A-A’ direction
Figure 3.  Ids-Vgs curve of the poly-Si NWs and the single-channel (SC) TANOS memories
Figure 4.  Program and erase (P/E) characteristics of the NWs TANOS devices.
Figure 6. Endurance characteristics of Pi-gate NWs TANOS NVM.
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