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Development of low temperature oxidation for crystalline silicon thin film transistor applications

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Figure

Figure 1: Diagram of typical liquid crystal display (LCD) pixel.  TFTs are used as pixel drivers to activate or deactivate given color filters
Figure 4: Oxide charges and their location within the MOS system.  Note the separation of the charges is for clarity, each type could be expected to be distributed evenly
Figure 10: Oxidation rate curves as a function of fluorine concentration, from Morita
Figure 13: Stress data by ambient NF3 concentration, reported by Kouvatsos [4].
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