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Effect of Transmission Line Measurement (TLM) Geometry on Specific Contact Resistivity Determination

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Figure

Figure 1.3: Difference of ρc values in literature between Integrated Circuits and SiliconPhotovoltaics.[5] [6] [7] [16]
Figure 2.5: Energy levels of interface states
Figure 4.2: Horizontal view of TLM device structure.
Figure 4.4: Current path under metal contact to n-type semiconductor.
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Self-aligned Silicide (SALICIDE) Modeling Results

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