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Dielectric Characteristics of Barium Strontium Titanate Based Metal Insulator Metal Capacitor for Dynamic Random Access Memory Cell

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Figure

Figure 1.  Structure of MIM capacitor for DRAM cell
Figure 2.  Composition of BST with dielectric constant
Figure 4.  Relationship between dielectric constant and dielectric loss at 1 kHz
Figure 5. Simulated leakage current density at room temperature at 1 kHz
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