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Multicharacterization approach for studying InAl(Ga)N/Al(Ga)N/GaN heterostructures for high electron mobility transistors

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Figure

FIG. 1. Schematic of the HEMT structures, (a) sample–A and (b) sample–B were grown in the close coupled shower headreactor, (c) Sample–C and (d) sample–D were grown in the horizontal reactor.
Figure 2used in the three direspectively. The diin Fig.thin films grown by MOVPE.estimated to be 0.8 nm (image not shown here)
FIG. 3. (a) Electron channelling contrast image showing V–defects decorating the grain boundaries (b) 2–beam dark fieldimage (0002 reflection) revealing the AlN and GaN bupropagating to the surface and connected to V–defects (e) high magnification image showing V-defect connected to a TD anda TD which is not connected to a V-defect (f) High–angle annular dark field image revealing a smooth interface between theffer layer (c) 0002 reflection (d) 10-10 reflection showing TDsAlN and GaN as well as the InAl(Ga)N layer.
FIG. 4. HRXRD θ-2θ diagram of InAl(Ga)N/Al(Ga)N/GaN/AlN on Al2O3 substrate.
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