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4H-SiC Trench-Gate MOSFET: Practical Surface-Channel Mobility Extraction.

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Figure

Figure 1.4:  4H-SiC vertical power         MOSFET with current path highlighted.
Figure 1.7: a) 4H-SiC (0001) wafer - crystal orientation,  b) Cross-sectional view of basal (0001) plane in hexagonal crystal structure
Figure 2.11:  Actual MOS capacitance as a function of actual MOS gate bias.
Figure 2.12:  6H-SiC electron surface mobility with surface coulombic scattering [6][23]
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