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Titanium Doped ITO Thin Films Produced by Sputtering Method

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Figure

Fig. 1Schematic diagram of the sputtering apparatus.
Fig. 4Relation between � and x for ITO [90] and Ti doped ITO [90] thinfilms produced by combinatorial sputtering method.
Fig. 7Effects of Q(O2) and THT on the �V of Ti doped ITO [90] thin filmsproduced by co-sputtering method.
Fig. 10Effects of THT on the � of TiO2 doped ITO [50] and Ti dopedITO [90] thin films produced by co-sputtering method, when Q(Ar)/Q(O2) = 50/0 and 50/0.3, respectively.
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