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Improved Mechanical Properties of Al2O3 Ceramics by Sputtered TiN Coatings

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Figure

Fig. 1 (a) Plan-view and (b) cross-sectional SEM images of the 0.5-μm-thick TiN flm deposited on Al2O3 substrate
Fig. 2 Friction coeffcients as a function of sliding distance for the Al2O3 substrate, 0.5-μm-thick TiN/Al2O3 substrate, and 1-μm-thick TiN/Al2O3 substrate.
Table 1 Elemental analyses using the EDS measurements for the surfaces of the wear-treated 0.5-μm-thick TiN/Al2O3 and 1-μm-thick TiN/Al2O3samples.
Fig. 6 OM observation of scratch track and acoustic emission signals detected during the scratch test for the 0.5-μm-thick TiN/Al2O3 sample.

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