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Extended Anode Effect for Tube Inner Coating of Non Conductive Ceramics by Pulsed Coaxial Magnetron Plasma

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Figure

Figure 1. Experimental apparatus.
Figure 2. (a) Discharge voltage; (b) Discharge current as a function of fraction of N2 fN2 %
Figure 3. Film thickness as a function of N2 %.
Figure 7. XPS analysis results.
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