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Electrical characterization and nanoscale surface morphology of optimized Ti/Al/Ta/Au ohmic contact for AlGaN/GaN HEMT

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Figure

Figure 1 Schematic of the AlGaN/GaN HEMT on the Si (111) substrate.
Figure 3 Microscope photographs of surface morphologynm) ohmic stacks with different SiN
Figure 4 The temperature dependence of the specific contact resistivity for all samples
Figure 6 The three-dimensional [3-D] AFM images of the surface morphology. The 3-D AFM images of the surface morphology withvarious ohmic contact systems after annealing at 850°C for 30 s: (a) sample 1, Ti/Al/Ti/Au with an RMS value of 41.223 nm; (b) sampl
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