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Characteristics of an ECR Sheet-Shaped Plasma Formed by a Combination of Permanent Magnets and Field Coils

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Figure

Fig. 1Cross-section of the sheet plasma device using permanent
Fig. 4Ignition (Ig) and extinction (Ex) powers at varying Arpressure from different field geometries, namely, fieldcoils (FC), permanent magnets (PM), and combination(PM+FC).
Fig. 6Ion saturation current (Isati) at varying pressure along thevacuum chamber’s central axis.
Fig. 8Images of the sheet plasma illustrating the sheet plasmawhen viewed from the top (Top view) and the sheet thick-ness along the horizontal center of the chamber viewed onits side (Side view).

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