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CMOS-Electromechanical Systems Microsensor Resonator with High Q-Factor at Low Voltage

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Figure

Fig. 1. Perspective-view schematic of a CMOS-MEMS      bulk mode resonator driven by a resistive heater and sensed through a piezoresistor
Fig. 2. Photos of a fabricated CMOS-MEMS thermal-piezoresistive resonator, including (a) global MEMS/IC optical view, (b) standalone device SEM view, and (c) FIB cut cross-sectional view of the beam
Fig. 4. Measured transmission spectrum under a fully

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