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The Role of Sputtering Current on the Optical and Electrical Properties of Si C Junction

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Figure

Figure 1. Schematic of plasma sputtering system.
Figure 3. The Raman spectra of Carbon layers for a range of plasma currents 70 A, 80 A and 90 A
Figure 4. X-ray spectrum for Carbon layers (a) 20 nm thickness, (b) 40 nm thickness and (c) 60 nm thickness
Figure 6. AFM images of Carbon layers for plasma current 90 A.

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