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Spin Coating Polyimide Film on Hydrogenated DLC Film Surface Prepared by Ion Beam Deposition Method

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Figure

Fig. 1The chemical structure of PMDA-ODA polyimide unit.
Fig. 3Raman spectra of annealed DLCH films.
Fig. 6Tape test for PI/DLCH/Si hybrid structure with (a) before and(b) after test with a 50X magnification.

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