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Stability of Postannealed Silicon Dioxide Electret Thin Films Prepared by Magnetron Sputtering

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Figure

Fig. 1Decay of normalized surface potential of SiO2 films tested undervarious conditions: in air at RT (⃝); at 60◦C, 90% (□); and at 80◦C, 90%(△).
Fig. 7Surface potential decay of SiO2 films postannealed for 10 (□), 30(△) and 60 (⃝) min.
Fig. 11Infrared absorption spectra of as-deposited (a) and postannealed(b) SiO2 films.

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