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Analysis of crystal defects by scanning transmission electron microscopy (STEM) in a modern scanning electron microscope

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Figure

Fig. 1 a Scheme of Helios Nanolab G4 FX dual-beam instrument with double-tilt holder for TEM specimens, STEM detector, through-the-lens detector (TLD), retractable on-axis CCD camera, and FIB column
Table 1 Visibility (+)/extinction (−) of dislocation contrast and g·b of dislocations 1–7 in Fig. 3 for different g
Fig. 5 BF-STEM images of the same specimen region in GaN and corresponding TED pattern for and g(1–100)/g(–1100) taken at a, d 30 keV, b, e 20 keV, c, f 10 keV
Fig. 6 30 keV BF-STEM cross-section images of the epitaxial GaN layer and corresponding TED pattern for different two-beam conditions using (a, d) g(–1100), (b, e) g(0002), (c, f) g(1–210)

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