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Fabrication and characterization of silicon nitride thin film planar waveguides produced by RF magnetron sputtering technique

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Figure

Figure 1.1: Illustration of symmetric planar waveguide ‎
Figure 2.1:  Planar waveguide structure infinite in y and z directions ‎
Figure 2.2: Modes in planar waveguide (Hunsperger, 2002) ‎
Figure 2.3.
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