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Large Area Growth of Uniform Single Layer MoS2 Thin Films by Chemical Vapor Deposition

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Fig. 1 a As-grown MoS2 thin films on a sapphire substrate in comparison with a bare sapphire substrate, b SEM image of an intentionallyscratched MoS2 thin films, c AFM image, d cross-sectional AFM image along the dotted line in the AFM image, e, f XPS spectra of MoS2 thin filmsalong with those of mechanically exfoliated MoS2 flakes
Fig. 2 a Raman and b PL spectra of MoS2 thin films on sapphireand SiO2/Si, mechanically exfoliated MoS2 flakes on SiO2/Si, and bulkMoS2 crystals and c UV-visible spectrum of MoS2 thin filmson sapphire
Fig. 3 a Cross-sectional TEM image of MoS2 thin films on sapphire, b high-magnification plan-view TEM image along with fast Fourier transformationpattern, c low-magnification plan-view TEM image along with SAED pattern MoS2 thin films
Fig. 4 ameasured at eight different positions of MoS FWHM of Raman E2g1 and A1g modes along with Δ (red diamond: Δ, white square: FWHM of Raman A1g mode, blue square: FWHM of RamanE12g mode) and b FWHM along with wavelength of PL emission (red diamond: wavelength of PL emission, blue square: FWHM of PL emission)2 thin films shown in the inset, c mapping of Raman A1g mode frequency, and d mapping of PL emissionwavelength of MoS2 thin films

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