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ABSTRACT

PRIYADARSHI, SHIVAM. Dynamic Electrothermal Simulation using Compact Macromodel

of Standard Cells. (Under the direction of Michael B. Steer.)

(2)

c

Copyright 2010 by Shivam Priyadarshi

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Dynamic Electrothermal Simulation using Compact Macromodel

of Standard Cells

by

Shivam Priyadarshi

A thesis submitted to the Graduate Faculty of

North Carolina State University

in partial fulfillment of the

requirements for the Degree of

Master of Science

Electrical Engineering

Raleigh, North Carolina

2010

APPROVED BY:

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DEDICATION

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BIOGRAPHY

Shivam Priyadarshi was born on 6th September 1983 in Patna, India. He received the

bachelor degree in Information and Communication Technology from Dhirubhai Ambani

Institute of Information and communication Technology (DA-IICT), India in May 2005.

During his undergraduate he worked as an research intern at Solid State Physics

Labora-tory, New Delhi on MESFET modeling. After graduating from DA-IICT, he worked for

2 years (March 2006- July 2008) as an engineer at Virage Logic (Now Synopsys), Noida.

At Virage Logic, he worked on design and development of Standard Cell libraries and

Memory Compilers.

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ACKNOWLEDGEMENTS

I would like to thank my advisor Dr. Michael B. Steer for giving me an opportunity

to work in his supervision. I am deeply grateful for his guidance, motivation, financial

support and above all, for having continuous faith in my work. I would also like to thank

Dr. Paul D. Franzon and Dr. David Schurig for serving on my committee.

My special thanks to Dr. Nikhil Kriplani for helping me understand fREEDA. I am

thankful to Dr. Rhett Davis, Dr. Xun Liu and Dr. Sharon Lubkin for their invaluable

suggestions.

I would like to thank my NCSU colleagues T. Robert Harris, Christopher S. Saunders,

Thorlindur Thorolfsson, Samson Melamed, W. Shepherd Pitts, Daniel Schinke, Dr. Neil

Di Spigna, Suresh Venkatesh, Ojas Ashok Bapat, Harun Demircioglu and Akshay Shyam

Pavagada Raghavendra for brainstorming discussions and feedbacks.

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TABLE OF CONTENTS

List of Tables

. . . .

vii

List of Figures

. . . .

viii

Chapter 1 Introduction

. . . .

1

1.1

Motivation . . . .

1

1.2

Original Contribution . . . .

2

1.3

Thesis Organization . . . .

3

Chapter 2 Literature Review

. . . .

5

2.1

Introduction . . . .

5

2.2

Electrothermal Simulation . . . .

5

2.3

Approaches to Electrothermal Simulation . . . .

7

2.4

Summary

. . . .

9

Chapter 3 Dynamic Electrothermal Simulation using Standard Cell

Macro-models

. . . .

10

3.1

Introduction . . . .

10

3.2

Standard Cells based Dynamic Electrothermal Simulation Methodology .

11

3.3

Compact Electrothermal Macromodel of Standard Cells . . . .

14

3.3.1

Inverter Macromodel . . . .

15

3.3.2

NAND Macromodel . . . .

23

3.3.3

NOR Macromodel

. . . .

31

3.3.4

Run time and memory usage comparison . . . .

39

3.3.5

Electrothermal simulation of Full Adder

. . . .

43

3.4

Thermal Network Extractor . . . .

47

3.5

Summary

. . . .

48

Chapter 4 Electrothermal Simulation of Three Dimensional Integrated

Circuit(3DIC)

. . . .

49

4.1

Introduction . . . .

49

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4.5

Summary

. . . .

70

Chapter 5 Conclusions

. . . .

71

References

. . . .

73

Appendices

. . . .

77

Appendix A

. . . .

78

A.1 Netlists and Model Parameters . . . .

78

A.1.1 150 nm CMOS EKV model parameters . . . .

78

A.1.2 Netlist for CMOS Inverter DC transfer characteristic . . . .

79

A.1.3 Netlist for CMOS Inverter transient response . . . .

80

A.1.4 Netlist for electrothermal simulation of CMOS Inverter . . .

81

A.1.5 Netlist for 2-Input CMOS NAND DC transfer characteristic

82

A.1.6 Netlist for 2-Input CMOS NAND Transient response . . . .

83

A.1.7 Netlist for electrothermal simulation of 2-Input CMOS NAND

Gate . . . .

85

A.1.8 Netlist for 2-Input CMOS NOR DC transfer characteristic .

86

A.1.9 Netlist for 2-Input CMOS NOR transient response . . . .

87

A.1.10 Netlist for electrothermal simulation of 2-Input CMOS NOR

Gate . . . .

89

A.1.11 Netlist for 8 bit Shift Register . . . .

90

A.1.12 Netlist for Electrothermal Simulation of Frequency

Multiplier-Divider Chain . . . .

92

Appendix B

. . . .

100

B.1 fREEDA Element Codes . . . .

100

B.1.1

CMOS Inverter Macromodel . . . .

100

B.1.2

CMOS Inverter Electrothermal Macromodel . . . .

117

B.1.3

2-Input CMOS NAND Macromodel . . . .

135

B.1.4

2-Input CMOS NAND Electrothermal Macromodel . . . . .

157

B.1.5

2-Input CMOS NOR Macromodel . . . .

180

B.1.6

D-Flipflop Macromodel . . . .

203

B.1.7

XOR Macromodel . . . .

214

B.1.8

Single Tone AC Power Source . . . .

220

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LIST OF TABLES

Table 2.1

Thermal-electrical analogy . . . .

7

Table 3.1

Run time and memory usage comparison for macromodel and

transistor-level implementations of CMOS Inverter.

. . . .

19

Table 3.2

Run time and memory usage comparison for macromodel and

transistor-level implementations of 2 input NAND gate. . . .

28

Table 3.3

Run time and memory usage comparison for macromodel and

transistor-level implementations of two input NOR gate. . . .

37

Table 3.4

Number of state variables, run time, and memory usage comparison

between macromodel and transistor-level implementations of various

designs. . . .

42

Table 3.5

Reduction in run time and memory usage due to macromodels,

compared to transistor-level implementations. . . .

42

Table 3.6

Worst case delay errors due to macromodels, compared to

transistor-level implementations. . . .

43

Table 4.1

Power dissipated by different cells present in one tile of the Tier C

and corresponding heat current fitting parameters (rth). . . .

61

Table 4.2

Electrical simulation statistics of complete chain. . . .

63

Table 4.3

Electrothermal simulation statistics of complete chain. . . .

63

Table 4.4

Electrothermal simulation statistics of fastest switching frequency

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LIST OF FIGURES

Figure 3.1

Flowchart of proposed dynamic electrothermal simulation

method-ology.The first step is to create electrical macromodel of standard

cells. The second step is to create electrothermal macromodels and

generate thermal netlist. The third step is to build and simulate

target application circuitry using these macromodels. . . .

13

Figure 3.2

CMOS Inverter schematic with various current components

iden-tified. . . .

16

Figure 3.3

Comparison of DC transfer characteristic between macromodel

and transistor-level implementation of CMOS Inverter. . . .

19

Figure 3.4

Comparison of Transient characteristic between macromodel and

transistor-level implementation of CMOS Inverter. . . .

20

Figure 3.5

Schematic of the electrothermal macromodel of the CMOS Inverter. 21

Figure 3.6

Rise in channel temperature of the Inverter macromodel with time. 22

Figure 3.7

Two input CMOS NAND schematic with various current

compo-nents identified. . . .

23

Figure 3.8

Illustration of replacing multiple transistors in parallel by one

equivalent transistor. . . .

26

Figure 3.9

Comparison of DC Transfer characteristic between macromodel

and transistor-level implementation of two Input NAND Gate. . .

28

Figure 3.10 Comparison of transient characteristic between macromodel and

transistor-level implementation of two Input NAND Gate.

. . . .

29

Figure 3.11 Electrothermal macromodel of the NAND gate. . . .

30

Figure 3.12 Rise in channel temperature of the NAND macromodel with time.

31

Figure 3.13 Two input NOR gate schematic with various current components

identified. . . .

32

Figure 3.14 Comparison of DC Transfer characteristic between macromodel

and transistor-level implementation of two input NOR Gate. . . .

36

Figure 3.15 Comparison of transient characteristic between macromodel and

transistor-level implementation of two input NOR Gate.

. . . . .

36

Figure 3.16 Electrothermal macromodel of the 2 input NOR gate.

. . . .

37

Figure 3.17 Rise in channel temperature of the NOR macromodel with time.

39

Figure 3.18 SR Latch schematic built using the NAND macromodel.

. . . .

40

Figure 3.19 D-Flipflop schematic built using the NAND and Inverter

macro-models. . . .

41

Figure 3.20 An 8-bit shift register schematic built using the D-Flipflop

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Figure 3.22 Transient temperature of sum node of full adder. . . .

45

Figure 3.23 Transient temperature of carry node of full adder. . . .

46

Figure 3.24 RC network associated to each grid block. . . .

48

Figure 4.1

Floor plan of the 3DIC chip [35]. . . .

51

Figure 4.2

Frequency multiplier-divider chain [35].

. . . .

52

Figure 4.3

Block diagram of one tile. . . .

53

Figure 4.4

The layout of a frequency multiplier. . . .

55

Figure 4.5

The layout of a frequency divider.

. . . .

56

Figure 4.6

Frequency multiplier circuits: (a) frequency multiplier circuit built

using electrothermal NAND macromodels and delay element in

fREEDA; and (b) chain of frequency multipliers built using

elec-trothermal XOR macromodels and delay element in fREEDA. . .

58

Figure 4.7

Frequency divider circuits: (a) frequency divider circuit built

us-ing electrothermal macromodel of D-Flipflop; and (b) chain of

fre-quency dividers. . . .

59

Figure 4.8

Layers extracted in the thermal network from the three-tier layout

structure.

. . . .

62

Figure 4.9

Transient waveform of multiplier-divider junction. . . .

65

Figure 4.10 Transient output of various frequency multipliers. . . .

65

Figure 4.11 Junction temperatures near various frequency multipliers. . . . .

66

Figure 4.12 Thermal profiles: (a) thermal profile of the die showing nine heat

spots each being the multiplier-divider junction of each tile; (b)

hottest point on the die, the multiplier-divider junction of tile (3,3)

1

. 67

Figure 4.13 Transient rise in the surface temperature near the hottest point,

obtained from the thermal measurements

2

. . . .

68

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Chapter 1

Introduction

1.1

Motivation

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breakdown and electromigration are accelerated at higher temperature [3]. Furthermore,

increase in temperature requires better heat sink and system cooling solutions which

increases the system cost [4]. So electrothermal issues are affecting the performance

and cost metrics of ICs hence they have become critical in IC design. It is very

impor-tant to address them early in the design phase to save design iterations. This requires a

methodology to perform fast and accurate electrothermal simulation. The electrothermal

simulation can be divided into two parts: static or steady-state simulation and dynamic

simulation. Given a power profile, steady-state simulation can determine the final

tem-perature to which an IC converges as time tends to infinity. Steady-state simulation can

provide a correct estimate of IC temperature only if the power profile does not change

with time or the thermal profile converges well before the power profile starts changing

[5]. Dynamic simulations are required to get the correct estimate of IC temperature when

IC power profile changes with time or varies before the thermal profile converges. It is

also useful in capturing transient variations in the electrical characteristics of signals due

to thermal effects. Furthermore, electrical response might be affected by instantaneous

temperature, causing possible malfunctions which also makes dynamic simulation

nec-essary. Since dynamic simulation is more computationally expensive than steady-state

simulation, it requires a computationally efficient simulation methodology.

1.2

Original Contribution

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cuit simulator fREEDA [6]. In these models temperature-dependent electrical parameters

are automatically updated with temperature change. Due to this, the transient changes

in power profile is captured which gives an accurate transient temperature profile. These

macromodels have a reduced number of state variables compared to transistor-level

im-plementation; hence simulations based on these models are faster than transistor-level

simulations. Furthermore, these macromodels are based on transistor equations, hence

produce accurate results. Electrothermal macromodels integrated with a

correspond-ing physically extracted thermal netlist, are used as basic buildcorrespond-ing block for chip-level

dynamic electrothermal simulation. Using this methodology, both transient surface

tem-perature and junction temtem-perature can be simulated which can be a useful tool to study

relationship between them. Power dissipation in different parts of an IC is different and

failure mechanisms of devices depend strongly upon local operating temperature [7]. So

it is very important to locate heat spots due to local power dissipation. Each

electrother-mal standard cell macromodel has a temperature terminal as well as electrical terminals

and by monitoring temperature on these terminals, the local transient temperature

pro-file around that standard cell can be estimated. This information in the design phase

can be very helpful in designing reliable ICs. Application of this methodology is shown

in heat spot modeling of a three dimensional integrated circuit (3DIC).

1.3

Thesis Organization

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Chapter 2

Literature Review

2.1

Introduction

In this chapter the basic principle of electrothermal simulation based on the electrical

thermal analogy is presented. The major requirements of electrothermal simulation are

discussed. Two major approaches to electrothermal simulation published in the literature

are described. Furthermore, trade-offs between these two approaches is presented and

reasoned why one of the approaches is used in this work. This gives a background for

standard cell based dynamic electrothermal simulation methodology.

2.2

Electrothermal Simulation

The time dependent three dimensional heat diffusion equation is

ρc

∂T

∂t

=

Q

(

x, y, z, t

) +

k

(

T

)

2

T

∂x

2

+

2

T

∂y

2

+

2

T

∂z

2

(17)

where

T

is temperature,

t

is time,

ρ

is material density,

c

is specific heat, and

Q

(x, y, z,

t

) is the rate of heat generation and

k

is temperature dependent thermal conductivity.

The temperature profile can be obtained by solving Eq. 2.1. In Eq. 2.1, the heat

generation rate

Q

(x, y, z, t

) is equivalent to the power consumption in electrical system.

So electrothermal simulation requires close interaction between electrical and thermal

simulations. The electrical simulation is required to obtain information on power

dis-sipation which is fed to the thermal simulation. The thermal simulation is required to

obtain temperature information which is fed to electrical simulation and temperature

dependent device and interconnect parameters are updated accordingly. For a dynamic

electrothermal simulation the following is required:

1. An electrothermal device model. This is a device model in which

temperature-dependent electronic parameters should change according to change in temperature.

2. A fast and accurate dynamic electrical simulation methodology for calculation of

power consumption. Usually electrothermal simulation is required to run for longer

time to see thermal effects, so it is very important to have a fast simulation

method-ology.

3. A fast and accurate thermal simulation methodology. This requires a thermal model

accurately representing the physical structure of chip and a method to solve the

heat Eq. 2.1.

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2.3

Approaches to Electrothermal Simulation

There are two main approaches to performing electrothermal simulation of ICs: the

re-laxation method; and the direct method or simultaneous iteration. In the rere-laxation

method electrical and thermal simulations are performed separately and both are

con-nected in an iteration loop [8, 9, 10, 11]. The loop is iterated repeatedly until electrical

and thermal convergence is reached. Usually Spice, ELDO, SABER, or similar circuit

simulator is used for electrical simulation and numerical techniques such as the finite

difference method, the finite element method or the boundary-element method is used

for thermal simulation.

In the direct method [12, 13, 14, 15], an electrical circuit model of a thermal system is

created based on the thermal-electrical analogies shown in Table 2.1 [16]. The electrical

and thermal circuit models are solved simultaneously as if they were one large electrical

circuit model. This effectively converts an electrothermal simulation to pure electrical

simulation.

Table 2.1: Thermal-electrical analogy

Thermal

Electrical

Temperature

T

[K]

Voltage

V

[V]

Heat,

Q

[J]

Charge,

Q

[C]

Heat transfer rate,

q

[W]

Current,

i

[A]

Thermal resistance,

R

T

[K/W]

Electrical resistance,

R[V/A]

Thermal capacitance,

C

T

[J/K]

Electrical capacitance,

C

[C/V]

Temperature rise ∆T = qR

T

Voltage difference ∆V = iR

(19)

and voltage (V

). The heat transfer rate corresponds to power dissipation in an electrical

system. This method requires solving the following set of equations using iteration [14]:

Y

E

0

0

Y

T H

V

T

=

i

(

V, T

)

q

(

V, T

)

(2.2)

In Eq. 2.2, Y

E

corresponds to the electrical modified nodal admittance matrix and Y

T H

corresponds to thermal admittance matrix.

The relaxation method is easier to implement as existing electrical and thermal

sim-ulators can be directly used but convergence of this method is slow in strongly coupled

thermal problems [12, 13]. Furthermore, very fast changes cannot be considered in this

method [14]. The direct method requires a more complex implementation than the

re-laxation approach but is capable of handling very fast changes [17]. The capability of

handling fast changes is very important for dynamic electrothermal simulation; hence in

this work the direct method is used. In the direct method there is the potential problem

of mixing of electrical and thermal currents. This problem has been addressed by

intro-ducing the concept of local reference nodes [18] in a multi physics simulator fREEDA [6].

In this work fREEDA is used for electrothermal simulation which has the capability of

simultaneously solving electrical and thermal circuits.

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inte-mainly addressed the transistor-level electrothermal modeling and computationally

ef-ficient modeling of substrate heat conduction for calculating the junction temperature

profile. In this work, a dynamic electrothermal simulation methodology for VLSI circuits

is proposed which is not only computationally efficient and accurate but also has the

capability of estimating the transient profile of both junction temperature and surface

temperature. Furthermore, it is also capable of simulating the local temperature profile

in different parts of VLSI circuits and the transient thermal impact on the electrical

characteristics of signals.

2.4

Summary

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Chapter 3

Dynamic Electrothermal Simulation

using Standard Cell Macromodels

3.1

Introduction

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3.2

Standard Cells based Dynamic Electrothermal

Simulation Methodology

In today’s IC industry standard cell-based design methodology is a very common method

of designing application specific integrated circuits. Standard cells are like bricks by

which integrated circuits can be built. A standard cell is a group of transistors which

provides a logic function such as Inverter, NAND, NOR, etc, arithmetic function such

as adder, multiplier etc, and storage functions such as flipflop, latch etc. In this work

compact electrical and electrothermal macromodels of these cells are developed. The goal

is to build circuits using these models and perform dynamic electrothermal simulation.

Figure 3.1 shows the methodology proposed in this work. The first step is to create

layout and compact electrical macromodel of standard cells. The layout of standard cell

can be obtained from standard cell libraries on given technology node. The compact

macromodels of standard cells are created for a given technology node which gives the

same functionality as the transistor-level implementation but with fewer state variables.

It is shown in later sections that this gives major run time improvement over a

transistor-level implementation.

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at the thermal terminal as current. From the voltage-temperature analogy presented in

Table 2.1, it is obvious that the voltage measured at the thermal terminal will represent

temperature. The thermal network extractor creates a thermal netlist from the layout

based on geometric proximity and material properties.

(24)

Layout of Standard Cells

Thermal Network Extractor

Thermal Network

Electrical Input

Compact Electrical Macromodel of Standard Cells

Electrical Output

Electrical Ground Power Supply

Thermal Ground Temperature

Terminal

Instantaneous Power calculated

in Macromodel Electrical

Input

Compact Electrothermal Macromodel of Standard Cells

Electrical Output

Electrical Ground Power Supply

Extracted Thermal Network Electrothermal Macromodel Creation

Build Circuits using Electrothermal Macromodel of Standard Cells integrated

with corresponding Thermal Network

Dynamic Electrothermal Simulation in fREEDA Automatic Dynamic

Updation of Temperature Dependent Device Parameters

+

-Tsnk

(25)

3.3

Compact Electrothermal Macromodel of

Stan-dard Cells

(26)

Finally, run time and memory usage comparison for macromodel and transistor-level

im-plementations of various designs are presented. This section is concluded by presenting

an electrothermal simulation example of a full adder.

In this work macromodels are implemented in fREEDA using the global modeling

approach [26]. In this approach, the port voltages and port currents are expressed as

functions of state variables and their derivatives as follows:

v

N L

(

t

) =

u

x

(

t

)

,

dxdt

, ....,

ddtmmx

, x

D

(

t

)

i

N L

(

t

) =

w

x

(

t

)

,

dxdt

, ....,

ddtmmx

, x

D

(

t

)

(3.1)

where

v

N L

(t) and

i

N L

(t) are vectors of port voltages and currents,

x

(t) is the vector of

state variable and

x

D

(t) is vector of time delayed state variable. The derivatives are

cal-culated by automatic differentiation packages integrated in fREEDA. The characteristic

equations of devices used in the model define the functions given in Eq. 3.1.

3.3.1

Inverter Macromodel

The schematic of the CMOS Inverter with various current components is shown in

Fig-ure 3.2. In this macromodel electrical characteristic equations are formulated in terms

of 3 state variables as follows:

x

[0] =

V DD,

x

[1] =

V

in

,

and

x

[2] =

V

out

.

(3.2)

(27)

VDD

GND

IN OUT

I

in

I

out

I

VDD

I

P

I

N

Figure 3.2: CMOS Inverter schematic with various current components identified.

equation of devices shown Figure 1 are based on EKV MOSFET [27] formulation. In the

EKV formulation, the drain, gate, and source voltages of the transistor are referenced

with respect to bulk. In this macromodel implementation these bulk- referenced voltages

are represented in terms of state variables given in Eq. 3.2 assuming source and bulk are

at same potential.

V

db N

=

x

[2]

V

db P

=

x

[2]

x

[0]

V

gb N

=

x

[1]

(28)

In fREEDA [6], it is assumed that a current source is attached to each terminal and

pump-ing current inside the terminals. The current enterpump-ing in each terminal is composed of

static current i.e. DC current and dynamic current. The dynamic current can be

mod-eled using nonlinear capacitances but their calculation is complex. Hence the dynamic

current is modeled using charges associated with the ports. The following is the gate

current formulation:

I

in

=

dQ

gN

dt

+

dQ

gP

dt

.

(3.4)

In Eq. 3.4,

Q

gN

and

Q

gP

are gate charge of NMOS and PMOS respectively. DC

current entering in gate is assumed to be zero. The output current is calculated as

I

out

=

I

N

+

I

P

+

dQ

dN

dt

+

dQ

dP

dt

.

(3.5)

In Eq. 3.5,

I

N

and

I

P

are DC drain current of NMOS and PMOS respectively.

Q

dN

and

Q

dP

are drain charge of NMOS and PMOS respectively. The current entering from

the terminal VDD is given by:

I

V DD

=

(

I

p

+

dQ

V DD

dt

)

.

(3.6)

where

Q

V DD

is the source charge of PMOS.

Based on the EKV MOSFET [27] model equations, the static current and charges in

Eq. 3.4,Eq. 3.5,and Eq. 3.6 are formulated as functions of bulk referenced drain, and gate

voltage of NMOS and PMOS (see Eq. 3.3):

(29)

The time derivative of charge is partitioned in to multiplication of voltage derivative

of charge and time derivative of voltage. The time derivatives of voltages are calculated

using the TimeDomainSV class of fREEDA. This class provides time differentiation

meth-ods and it is also used to exchange information between an element and a state variable

based time domain analysis. The voltage derivative of charge is calculated using Sacado

[28], an automatic differentiation package.

(30)

0 0.5 1 1.5 0

0.5 1 1.5

Output Voltage (V)

Input Voltage (V)

Macromodel Transistor−level

Figure 3.3:

Comparison of DC transfer characteristic between macromodel and

transistor-level implementation of CMOS Inverter.

The run time and memory usage of the macromodel and transistor level

implemen-tations are compared by running a transient simulation for 100

µ

s with a step size of 1

ns. The state variable-based fixed time step time marching transient analysis method is

used for these simulations. The simulations are performed on a 3 GHz Intel Xeon server

having 32 GB of RAM. Table 3.1 summarizes the results.

Table 3.1: Run time and memory usage comparison for macromodel and transistor-level

implementations of CMOS Inverter.

Implementation

# of State Variables

Run Time (sec)

% of RAM used

Compact Macromodel

3

6

0.2

(31)

2.95 2.96 2.97 2.98 2.99 3 x 10−5 −0.2

0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6

Time (s)

Voltage (V)

Input voltage Macromodel output Transistor−level output

Figure 3.4: Comparison of Transient characteristic between macromodel and

transistor-level implementation of CMOS Inverter.

In the electrical macromodel described above, the temperature is specified as a model

parameter and is kept constant throughout the simulation. So, the device equations

are evaluated for a constant temperature and temperature change due to self heating is

not handled. To include thermal effects, the electrothermal macromodel of inverter is

created from its electrical macromodel by introducing temperature as an additional state

variable.

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Thermal Ground

Iheat

VDD

GND

IN OUT

Iin Iout

IVDD

IP

IN

Thermal Network

Temperature

+

-Tsnk

Figure 3.5: Schematic of the electrothermal macromodel of the CMOS Inverter.

parameters include the long channel threshold voltage, bulk fermi potential, mobility,

longitudinal critical field, and the second impact ionization coefficient. As

x

[3] changes,

these parameters are automatically updated accordingly.

I

heat

in Figure 3.5 is the heat

current flowing into the thermal network which is equal in magnitude to the power

dis-sipated in electrical macromodel.

I

heat

is calculated as following:

I

heat

=

((

I

N

+

dQ

dN

dt

)

V

ds N

+ (

I

P

+

dQ

dP

dt

)

V

ds P

)

.

(3.9)

where

V

ds N

and

V

ds P

are drain-source voltage of NMOS and PMOS respectively.

I

heat

includes all both dynamic and static power dissipation.

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channel temperature with time.

0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1

x 10−3 −0.01

0 0.01 0.02 0.03 0.04 0.05 0.06

Time (s)

Temperature Rise (K)

(34)

3.3.2

NAND Macromodel

The schematic of the NAND macromodel with various current components is shown in

Figure 3.7. In this macromodel the electrical characteristic equations are formulated in

terms of 4 state variables as follows:

x

[0] =

V DD,

x

[1] =

V

in1

,

x

[2] =

V

in2

,

and

x

[3] =

V

out

.

(3.10)

VDD

IN1

IN2

OUT

GND

I

P1

I

P2

I

VDD

I

N

+i

n

I

out

P1 P2

N1

N2

I

IN1

I

IN2 x

N1+N2

(35)

The complete transistor-level implementation requires 12 state variables, 3 for each

transistor. So the number of state variable in the macromodel is 1/3 of the state variables

required for transistor-level implementation.

The bulk referenced drain, gate and source voltages of each transistor are represented

in terms of state variables given in Eq. 3.10. The PMOS voltages are given by Eq. 3.11

assuming source and bulk are at same potential.

V

db P1

=

x

[3]

x

[0]

,

V

gb P1

=

x

[1]

x

[0]

,

V

sb P1

= 0

,

V

db P2

=

x

[3]

x

[0]

,

V

gb P2

=

x

[2]

x

[0]

,

and

V

sb P2

= 0

.

(3.11)

In the NAND schematic, see Figure 3.7, the ground path has two NMOS transistors

in series. In the macromodel formulation the internal node ‘x’ is eliminated by replacing

the two NMOS transistors in series with a single equivalent transistor. The

transcon-ductance of the equivalent transistor is given by

β

1

β

2

/(

β

1

+

β

2

)

where

β

1

and

β

2

are the

transconductances of individual NMOS transistors. This equivalent transconductance is

used for calculating the equivalent DC drain current

I

N

shown in Figure 3.7. The smaller

(36)

equations summarize the above formulation.

if (

x

[1]

> x

[2])

V

db N2

=

x

[3]

V

gb N2

=

x

[2]

V

sb N2

= 0

β

eq

=

β

1

β

2

/

(

β

1

+

β

2

)

i

n

=

dQdtdN2

.

else

V

db N1

=

x

[3]

V

gb N1

=

x

[1]

V

sb N1

= 0

β

eq

=

β

1

β

2

/

(

β

1

+

β

2)

i

n

=

dQdtdN1

.

(3.12)

where

i

n

is dynamic current flowing through NMOS transistors.

Q

dN1

and

Q

dN2

are the

drain charges of N1 and N2 respectively.

(37)

N1 N2 Nn-1 Nn N1+N2+…..+Nn-1+Nn

βeq=β1+β2+---+βn-1+βn

Figure 3.8:

Illustration of replacing multiple transistors in parallel by one equivalent

transistor.

The output current

I

out

shown in Figure 3.7 has DC components and dynamic

com-ponents. DC components are calculated using the EKV MOSFET [27] model equations

and the dynamic currents are calculated by taking the time derivative of corresponding

nodal charge.

I

out

is given by

I

out

=

I

P1

+

I

P2

+

I

N

+

i

n

+

dQ

dP1

dt

+

dQ

dP2

dt

.

(3.13)

In Eq. 3.13,

I

P1

and

I

P2

are DC drain currents flowing through P1 and P2 respectively.

I

N

is the equivalent DC drain current flowing through the NMOS series chain;

i

n

is the

equivalent dynamic drain current flowing through the NMOS series chain which is given

by Eq. 3.12; and

Q

dP1

and

Q

dP2

are the drain charges of P1 and P2 respectively. The

current entering the VDD terminal is given by

I

V DD

=

I

P1

+

I

P2

+

dQ

V DD

dt

.

(3.14)

(38)

In Eq. 3.15,

Q

gN1

and

Q

gN2

are the gate charges of N1 and N2 respectively. Similarly,

Q

gP1

and

Q

gP2

are the gate charges of P1 and P2 respectively. The DC current entering

in each input terminal is assumed to be zero. The DC current and charge in Eq. 3.12,

Eq. 3.13, Eq. 3.14, and Eq. 3.15 are formulated as functions of the state variables given

in Eq. 3.11:

{

I

P1

, I

P2

, I

N

, Q

V DD

, Q

dP1

, Q

dP2

, Q

dN1

, Q

dN2

, Q

gP1

, Q

gP2

, Q

gN1

, Q

gN2

}

=

f

(

x

[0]

, x

[1]

, x

[2]

, x

[3])

.

(3.16)

(39)

0 0.5 1 1.5 0

0.5 1 1.5

Output Voltage (V)

Input Voltage (V)

Macromodel Transistor−level

Figure 3.9:

Comparison of DC Transfer characteristic between macromodel and

transistor-level implementation of two Input NAND Gate.

The run time and memory usage of the macromodel and transistor level

implemen-tations are compared by running a transient simulation for 100

µ

s with a step size of 1

ns. The state variable-based fixed time step time marching transient analysis method is

used for these simulations. The simulations are performed on a 3 GHz Intel Xeon server

having 32 GB of RAM. Table 3.2 summarizes the results.

Table 3.2: Run time and memory usage comparison for macromodel and transistor-level

implementations of 2 input NAND gate.

Implementation

# of State Variables

Run Time (sec)

% of RAM used

Compact Macromodel

4

9

0.3

(40)

2.8 2.9 3 3.1 3.2 3.3 3.4 3.5

x 10−5 −0.2

0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6

Time (s)

Output Voltage (V)

Macromodel Transistor−level

Figure 3.10: Comparison of transient characteristic between macromodel and

transistor-level implementation of two Input NAND Gate.

ature as an additional state variable. The electrothermal macromodel of the NAND has

two additional terminals: Temperature and Thermal Ground. It is shown in Figure 3.11.

The thermal network shown in Figure 3.11 represents the physical structure of the

NAND gate. It can be directly extracted from the layout using numerical techniques or

a compact thermal model can be developed to represent this structure.

if (

x

[1]

> x

[2])

I

heat

=

((

I

N

+

i

n

)

V

ds N2

+ (

I

P1

+

dQdtdP1

)

V

ds P1

+ (

I

P2

+

dQdtdP2

)

V

ds P2

)

.

else

(41)

VDD

IN1

IN2

OUT

GND

IP1 IP2

IVDD

IN+in

Iout

P1 P2

N1

N2 IIN1

IIN2 x

N1+N2

Thermal Network Temperature

Iheat

Thermal Ground

+ -Tsnk

Figure 3.11: Electrothermal macromodel of the NAND gate.

(42)

0 0.2 0.4 0.6 0.8 1

x 10−3 0

0.05 0.1 0.15 0.2 0.25

Time (s)

Temperature Rise (K)

Figure 3.12: Rise in channel temperature of the NAND macromodel with time.

3.3.3

NOR Macromodel

The schematic of the NOR macromodel with various current components is shown in

Figure 3.13

The electrical characteristics of the NOR gate is formulated using following 4 state

variables:

x

[0] =

V DD,

x

[1] =

V

in1

,

x

[2] =

V

in2

, and

x

[3] =

V

out

.

(3.18)

(43)

GND

VDD

IN1

IN2

OUT P1

P2

N1 N2

I

IN1

I

IN2

I

N1

I

N2

x

I

out

I

P

+i

p

I

VDD

Figure 3.13: Two input NOR gate schematic with various current components identified.

in this macromodel is 1/3 of the state variables required for transistor-level

implementa-tion.

(44)

V

gb N1

=

x

[1]

,

V

db N1

=

x

[3]

,

V

sb N1

= 0

,

V

gb N2

=

x

[2]

,

V

db N2

=

x

[3]

,

and

V

sb N2

= 0

.

(3.19)

The NOR gate has two PMOS transistors in series in the VDD path as shown in

Fig-ure 3.13. In the macromodel formulation, the internal node ‘x’ is eliminated by replacing

the two PMOS transistors in series with a single equivalent transistor. The

transcon-ductance of the equivalent transistor is given by

β

1

β

2

/(

β

1

+

β

2

)

where

β

1

and

β

2

are the

transconductances of individual PMOS transistors. This equivalent transconductance is

used for calculating equivalent DC drain current

I

P

shown in Figure 3.13. The bigger

(45)

if (

x

[2]

> x

[1])

V

db P2

=

x

[3]

x

[0]

V

gb P2

=

x

[2]

V

sb P2

= 0

β

eq

=

β

1

β

2

/

(

β

1

+

β

2)

i

p

=

dQdtdP2

.

else

V

db P1

=

x

[3]

x

[0]

V

gb P1

=

x

[1]

V

sb P1

= 0

β

eq

=

β

1

β

2

/

(

β

1

+

β

2

)

i

p

=

dQdtdP1

.

(3.20)

The output current

I

out

shown in Figure 3.13 has DC components and dynamic

components. The DC components are calculated using the EKV mosfet model equations

and dynamic currents are calculated by taking the time derivative of corresponding nodal

charge.

I

out

is given by Eq. 3.21.

I

out

=

I

N1

+

I

N2

+

I

P

+

i

p

+

dQ

dN1

dt

+

dQ

dN2

dt

.

(3.21)

(46)

I

V DD

=

I

P

+

dQ

V DD

dt

.

(3.22)

where

Q

V DD

is taken as source charge of P2 if x[2]

>

x[1], otherwise it is taken as source

charge of P1.

The currents entering the input terminals are formulated as following:

I

IN1

=

dQgN1

dt

+

dQgP1

dt

I

IN2

=

dQgN2

dt

+

dQgP2

dt

.

(3.23)

whereQ

gN1

and

Q

gN2

are the gate charges of N1 and N2 respectively. Similarly,

Q

gP1

and

Q

gP2

are the gate charges of P1 and P2 respectively. The DC current entering in

each input terminal is assumed to be zero.

(47)

0 0.5 1 1.5 0

0.5 1 1.5

Output Voltage (V)

Input Voltage (V)

Macromodel Transistor−level

Figure 3.14:

Comparison of DC Transfer characteristic between macromodel and

transistor-level implementation of two input NOR Gate.

2.1 2.2 2.3 2.4 2.5 2.6 2.7 2.8 2.9 3

x 10−5 −0.2

0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6

Time (s)

Output Voltage (V)

Macromodel Transistor−level

(48)

Table 3.3: Run time and memory usage comparison for macromodel and transistor-level

implementations of two input NOR gate.

Implementation

# of State Variables

Run Time (sec)

% of RAM used

Compact Macromodel

4

10

0.3

Transistor Level

12

42

0.5

used for these simulations. The simulations are performed on a 3 GHz Intel Xeon server

having 32 GB of RAM. Table 3.3 summarizes the results.

The electrothermal macromodel of the NOR gate is shown in Figure 3.16. It was

created from the electrical macromodel by introducing temperature as an additional state

variable. All temperature-dependent device parameters are expressed as function of this

state variable. As temperature changes these parameters get updated automatically.

GND VDD

IN1

IN2

OUT P1

P2

N1 N2

IIN1

IIN2

IN1 IN2

x

Iout

IP+ip

IVDD

Thermal Network Temperature

Iheat

Thermal Ground

+ -Tsnk

(49)

I

heat

is given by Eq. 3.24

if (

x

[2]

> x

[1])

I

heat

=

((

I

P

+

i

p

)

V

ds P2

+ (

I

N1

+

dQdtdN1

)

V

ds N1

+ (

I

N2

+

dQdtdN2

)

V

ds N2

)

.

else

I

heat

=

((

I

P

+

i

p

)

V

ds P1

+ (

I

N1

+

dQdtdN1

)

V

ds N1

+ (

I

N2

+

dQdtdN2

)

V

ds N2

)

.

(3.24)

where

V

ds N1

,

V

ds N2

,

V

ds P1

, and

V

ds P2

are drain source voltage of N1, N2, P1 and P2

respectively.

(50)

0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 x 10−3 0

0.05 0.1 0.15 0.2 0.25 0.3 0.35

Time (s)

Temperature Rise (K)

Figure 3.17: Rise in channel temperature of the NOR macromodel with time.

3.3.4

Run time and memory usage comparison

In this subsection the run time and memory usage comparison between electrical

simu-lations using macromodel and transistor-level implementations are presented. For these

comparisons, complex cells such as SR-Latch, D-Flipflop, and 8-bit shift register were

created using basic cells presented in Section 3.3. It is observed that for the large scale

circuits, the macromodel implementation gives major run time improvement. The

per-centage deviation of macromodel delay from transistor-level delay is also presented.

Figure 3.18 shows the schematic of an SR-Latch built using NAND macromodel. It

has 8 state variables whereas an equivalent transistor-level implementation requires 24

state variables. So the number of state variables is reduced by a factor of 3 which reduces

the run time by a factor of 4.

(51)

NAND

NAND

Q

Q

R

S

Figure 3.18: SR Latch schematic built using the NAND macromodel.

(52)

NAND

NAND

NAND

NAND

NAND

NAND NAND

NAND

Inverter D

CLK

Q

Q

Figure 3.19: D-Flipflop schematic built using the NAND and Inverter macromodels.

Q Q

D

CLK

Q Q

D

CLK

Q Q

D

CLK

Q Q

D

CLK

Q Q

D

CLK

Q Q

D

CLK

Q Q

D

CLK

Q Q

D

CLK

Input

CLK

Figure 3.20: An 8-bit shift register schematic built using the D-Flipflop macromodels.

(53)

stan-dard cells. Table 3.5 and Table 3.6 show that dynamic simulation using macromodel

of standard cells, run faster and consume lesser memory than transistor-level simulation

while maintaining the accuracy in an acceptable limit.

Table 3.4: Number of state variables, run time, and memory usage comparison between

macromodel and transistor-level implementations of various designs.

# of State Variable

Run time

% of RAM used

Design

Macro.

Trans.

Macro.

Trans.

Macro.

Trans.

Inverter

3

6

6

s

9 s

0.2

0.3

2-input NAND gate

4

12

9 s

37 s

0.3

0.5

2-input NOR gate

4

12

10 s

42 s

0.3

0.5

SR-Latch

8

24

19 s

1 m 16 s

0.4

0.7

D-Flipflop

35

99

3 m 16 s

28 m 2 s

0.5

1.0

8-bit Shift Register

280

792

2.5 h 29 m

90 h 50 m

2.4

6.6

Table 3.5: Reduction in run time and memory usage due to macromodels, compared to

transistor-level implementations.

Design

Reduction in run time

Reduction in memory usage

Inverter

1.5x

1.5x

2-input NAND

4.11x

1.62x

2-input NOR

4.2x

1.62x

SR-Latch

4x

1.75x

D-Flipflop

8.58x

2.00x

(54)

Table 3.6:

Worst case delay errors due to macromodels, compared to transistor-level

implementations.

Design

Delay error (%)

Inverter

0.01

2-input NAND

0.32

2-input NOR

0.36

SR-Latch

0.54

D-Flipflop

0.62

8-bit Shift Register

0.80

3.3.5

Electrothermal simulation of Full Adder

The electrothermal schematic of full adder is shown in Figure 3.21.

The full adder

functionality is realized using 9 electrothermal NAND macromodels. The temperature

terminal of each electrothermal NAND macromodel is connected to a thermal heat sink

through a 10 Ω resistor.

(55)
(56)
(57)
(58)

3.4

Thermal Network Extractor

(59)

Grid Block

Figure 3.24: RC network associated to each grid block.

3.5

Summary

(60)

Chapter 4

Electrothermal Simulation of Three

Dimensional Integrated

Circuit(3DIC)

4.1

Introduction

(61)

4.2

3DIC Test Chip Description

4.2.1

Motivation behind 3DIC

(62)

is proposed using which local junction temperature and surface temperature profile of IC

can be estimated in the design phase. This methodology is tested on a 3DIC test chip

described in next subsection.

4.2.2

3DIC Test Chip

In this work, the 3DIC chip presented in [35] is considered. This chip is built using

MIT-LL 3-D through-via process [36]. This is 180nm fully depleted silicon-on-insulator

(FDSOI) process which has three wafer-integrated tiers. Each tier has three metal layers.

Figure 4.1 shows the floor plan of the chip. Tier A is the base wafer. The handle

substrates of tiers B and C are removed and tier B is inverted, aligned and bonded to

tier A using low-temperature wafer-wafer oxide [35]. 3D vias are etched through the

oxides and filled with tungsten. Similarly tier C is deposited onto tier B.

Tier C

Tier B

Tier A

Figure 4.1: Floor plan of the 3DIC chip [35].

(63)

These frequency multipliers and dividers are asynchronous circuits and uses handshaking

protocol to communicate. Asynchronous circuits are used in this design because it allows

to directly measure maximum local throughput of each part of the circuit without making

any modifications to them, in the presence of process, voltage and temperature variation

[35]. In the synchronous design, the impact of process, voltage and temperature variation

on one part of the circuit starts impacting performance of other parts because they are

driven by same clock. This makes measurement of maximum local throughput a tedious

task. Apart from multipliers and dividers,each tile also has a repeater control block and

bucket block. The repeater control block is a data generator which feeds the data to

first frequency multiplier. The bucket block is connected to last divider and generates

final output. It also sends the handshaking signal back to last divider and completes the

handshaking communication. Figure 4.3 shows complete block diagram of one tile.

Figure

Figure 3.1: Flowchart of proposed dynamic electrothermal simulation methodology.Thefirst step is to create electrical macromodel of standard cells
Figure 3.2: CMOS Inverter schematic with various current components identified.
Figure 3.3:Comparison of DC transfer characteristic between macromodel andtransistor-level implementation of CMOS Inverter.
Figure 3.4: Comparison of Transient characteristic between macromodel and transistor-level implementation of CMOS Inverter.
+7

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