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Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays

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Figure

Fig. 1 Schematic (left) and real(right) images on fabrication ofa ZnO NRA sensor. a As-synthesized ZnO NRA on a Pt-coated Si (001) substrate
Fig. 2 a Bright-field TEMimage observed at the interfacebetween a ZnO NRA and asubstrate
Fig. 3 a I–Vfunction of O behavior of a ZnO NRA chemical sensor measured atdifferent O2 concentrations
Fig. 5 a Resistance change in a ZnO NRA chemical sensor measuredat different NO2 concentrations

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