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DLC Film Fabricated by a Composite Technique of Unbalanced Magnetron Sputtering and PIII

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Figure

Fig. 2The Raman spectrum of Ti/TiN/Ti(N,C)/DLC multilayer film.
Fig. 5Variation of hardness of films as a function of the indentation depth.
Fig. 6Variation of elastic modulus of films with the indentation depth.

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