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Al Doping Effect on the Surface Morphology of ZnO Films Grown by Reactive RF Magnetron Sputtering

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Figure

Figure 1. UV-visible optical transmittance spectra for the ZnO and ZnO:Al films deposited onto glass substrates
Figure 4. XRD spectra of pure ZnO and ZnO:Al films de-posited onto glass substrates.
Figure 5. AFM images (2 μZnO:Al (glass), (c) ZnO (Si) and (d) ZnO:Al (Si).m × 2 μm) of ZnO and ZnO:Al films deposited onto glass and silicon substrates
Figure 6. AFM profiles of 2 μsubstrates. To avoid superposition the profiles have been shifted vertically.m obtained by lateral scanning of ZnO and ZnO:Al films deposited onto glass (a) and silicon (b)

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