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K Small-invasivesampilngmachine ,Onilnesampilng, Smal lsample ,Spherica lmachine .l

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A Theresearchanddevelopmen tofsmall-invasivesamplingmachine(SISM) ,whichcanbe o

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m caiton value in

g n i l p m a s e h T . s n o it a r e d i s n o c n g i s e d s t i d n a M S I S a d e s o p o r p r e p a p s i h T . e c it c a r p g n i r e e n i g n E

l a i r e t a m g n i l p m a s g n i v o r p m i r o f t n e m e g n a r r a e l p m a s l a n o i s n e m i d l l a m s d n a n a l p y r o t c e j a r t

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l o o t e h T . d e i d u t s s a w g n it a o c e d a l b l o o t e h t f o n o i t a z i r e t c a r a h c e c n a m r o f r e p d n a d o h t e m n o it a r a p e r p

g n i w s A . d e n n a l p e r e w n o i t o m d e e f y r a t o r d n a n o i t o m g n i t t u c y r a t o

r -level-typecenteringmechanism

e m g n i d e e f s a d e n g i s e d s a

w chanism .Samplesofformofspherica lcrownwith diameter35mmand

n i m o r f n w o d e k a t e b n a c m m 4 s s e n k c i h

t -serviceequipmen.t

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o t d e e n t n e g r u n a e v a h y l l a u s u e l p o e

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r andsafetystatusoft hespecia lequipmen,tespeciallysuchast hepowerstationequipmen,t s

e c i v e d l a c i m e h c d n a s e n i l e p i p d n a t n e m p i u q e s s e c o r

p .Therefore ,i thas importan ttheoretica l

d n a r o t i n o m o t t i f e n e b l a i c o s d n a e u l a v g n i r e e n i g n e , e c n a c i f i n g i

s evaluatet hestatusoft heequipmen t

. e c i v r e s n i

e h t m o r f l a i r e t a m e g r a l e v o m e r o t e l b i s s o p m i s i t

I i -n serviceequipmentt omakestandardsamples

e u q i n h c e t t s e t h c n u p l l a m s e h t d e p o l e v e d e l p o e P . t n e m p i u q e l a i c e p s e h t f o y t i r a l u c i t r a p e h t o t e u d

l u a r d y h d n

a ic bulging technique in order to evaluate the materia lproperties of the in-service

n i e h t f o y d o b e h t n o l a i r e t a m f o e c e i p l l a m s a e k a t o t d e e n y l n o s d o h t e m t s e t e s e h T . t n e m p i u q

e

-e v e t a r e n e g l l i w g n i l p m a s e h t f o e s u a c e b s t i p w o l l a h s e h T . t n e m p i u q e e c i v r e

s ryl owstress,t heshallow

s t i

p ’ surfaces are smooth and the shallow pits are no need to be repaired .Therefore ,this micro e h t f o e c a f r u s e h t o t m r a h s e o d t a h t d o h t e m g n i l p m a s a s a d e r e d i s n o c e b n a c d o h t e m g n i l p m a s

t n e m p i u q

e [1].

d e v o m e r l a i r e t a m y n i t e h

T fromtheequipmen tcanbemadeinto asmal lcircularspecimen wtih

y r a d n u o b n i a r g d n a s k c a r c e c a f r u s l l a m S . m m 0 1 ~ 5 f o r e t e m a i d e h t d n a m m 5 . 0 f o s s e n k c i h t e h t

e h T . e p o c s o r c i m n o r t c e l e n a r o e p o c s o r c i m l a c i t p o r e w o p h g i h a r e d n u d e v r e s b o e b n a c s n o i s u l c n i

a

s mplecanbeusedt oevaluatet hepropertiesoff racturet oughness ,hardness ,radiaitonembrtitlemen t , e u g it a f , e l i s n e t n i r o i v a h e b l a i r e t a m f o e g n a h c e h t t s e t o t d e s u e b o s l a n a c e l p m a s e h T . n o o s d n a

. s t n e m n o r i v n e e v i s o r r o c d n a , p e e r c

y b d e n i a t b o a t a d e h

T the micro sample tes tmethod can bedirectly used to establish thedesign

n i f o n o i t a u l a v e y t e f a s , t n e m p i u q e l a i c e p s f o a i r e t i r

c -serviceequipment ,equipmen tlife extension ,

o m d n a e c n a n e t n i a m t n e m p i u q e d n a , s i s y l a n a e d o m e r u l i a f , n o it a m i t s e e f i l l a u d i s e

r nitoring.

e t i s g n i l p m a s e h t f o s n o i t i d n o c e h t r e d i s n o

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o r c i

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n i h c a

m [2] .Finish the design and verification of thedynamicsystem ,transmission system ,cutting . e c a p s w o r r a n a n i e n i h c a m g n i l p m a s l a c i n a h c e m e h t f o m e t s y s l o r t n o c d n a m e t s y s t n a l o o c , m e t s y s

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r e t t u c l w o

b forthesampling machine ,including high strength too lstee lmolding ,cu tteredgewear ,

g n i t a o c t n a t s i s e

r as wel las the manufacturing processof bow lcutter ,too lmaterial ,too lforming

o r p n o i t a n i b m o c g n i t a o c r a e w e g d e r e t t u c e h t f o g n i n e e r c s d n a s s e c o r

p cess .Stabilityandsafetydesign

. s r e t e m a r a p g n il p m a s f o n o it c e l e s e h t d n a e n i h c a m g n i l p m a s f o s s e c o r p g n il p m a s n i

. d e p a h s p a c l a c i r e h p s s i g n il p m a s o r c i m e h t , 1 e r u g i F n i n w o h s s i g n i l p m a s o r c i m e h t f o e z i s e h T

e r a H s s e n k c i h t e h t d n a R s u i d a r e h

T relatedt ot hediameterofspherica lcapL .Thet hicknessoft he

e b n a c g n i l p m a s o r c i m h c a E . m m 0 5 ~ 0 3 = L p a c l a c i r e h p s f o r e t e m a i d e h t , m m 5 s i g n i l p m a s o r c i m

2 s i g n il p m a s e h t f o s s e n k c i h t e h t f I . e z i s r i e h t o t g n i d r o c c a s n e m i c e p s o r c i m f o r e b m u n a f o e d a

m mm ,

s w o r 4 r o 3 , m m 4 s i s s e n k c i h t e h t f I . s s e n k c i h t f o n o i t c e r i d e h t n i e d a m e b n a c s n e m i c e p s f o s w o r o w t

g n i d r o c c a e d a m e b n a c g n i l p m a s o r c i m , m m 0 4 = L , n o i t c e r i d e n a l p e h t n I . e d a m e b n a c s n e m i c e p s f o

3 ~ 5 1 , y a w s i h t n I . 2 e r u g i F n i t n e m e g n a r r a e h t o

t 5 micro specimenscanbemadefromtheremoved

.l a i r e t a m y n i t

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F ure1 .Sizeandstructura lshapeofmicro-sample. Figure2 .Arrangemen tofmicro-specimensi nt hesampling.

h c r a e s e

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C accordingt ot her equirementsoft hesamplef ort hemicro

e g a m a

d t estanddeterminet hedesignconstraintsoft hemicrodamagefas tmicro-samplingmachine . e

t s y s c i m a n y d e h t f o n o i t a c i f i r e v d n a n g i s e d e h t h s i n i

F m ,transmission system ,cutting system ,

. e c a p s w o r r a n a n i e n i h c a m g n il p m a s l a c i n a h c e m e h t f o m e t s y s l o r t n o c d n a m e t s y s t n a l o o

c Facliities

d e t s e t d n a d e n g i s e d e r

a to mee tdifferen tstiesand differen tsamplingequipment .Study thespecia l

t r o f r e t t u c l w o

b hesampling machine ,including high strength too lstee lmolding ,cu tteredgewear

g n i t a o c t n a t s i s e

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. s s e c o r p n o i t a n i b m o c g n i t a o c r a e w e g d e r e t t u c e h t f o g n i n e e r c s d n a s s e c o r

p Stabilityandsafetydesign

. s r e t e m a r a p g n il p m a s f o n o it c e l e s e h t d n a e n i h c a m g n i l p m a s f o s s e c o r p g n i l p m a s n

i hT e projec t

d n a h c r a e s e r s t n e n o p m o c y e k , n o i t c e l e s l e d o m d n a e l p i c n i r p s ' e n i h c a m g n i l p m a s e h t s e v l o v n i y l n i a m

s t n e n o p m o c l a c i n a h c e m , t n e m p o l e v e

d design , automatic contro l parameter optimization , field

h t i w e n i h c a m g n i l p m a s d e l i f a e r u t c a f u n a m , t n e m e v o r p m i d n a g n i g g u b e d h g u o r h T . n o o s d n a n o i t a x i f

y l a n a , e n i h c a m g n i l p m a s e h t f o y t i l i b a il e r e h t t s e T . n o it c n u f t c e f r e

p ze the material’s changes of

c u r t

s tureand performance before and after sampling ,study the effec tofdifferen tcutitng rateson .

d n e e h t t a s t n e m u c o d e u q i n h c e t e h t h s i n i f d n a , s e i t r e p o r p l a i r e t a m d n a y c n e i c i f f e g n i l p m a s

a s e r u t c u r t s e h t , e v o b a d e n o i t n e m s a e d i d n a s t n e t n o c e h t o t g n i d r o c c

A nd functions of the

. 3 e r u g i F n i n w o h s e r a d e n n a l p d n a d e n g i s e d e n i h c a m g n i l p m a s l a c i n a h c e m

: s w o l l o f s a e r a s t n e t n o c h c r a e s e r c i f i c e p s e h T

. s t n e m e r i u q e r g n il p m a S .

a The recommended sizesof thesmal lpunch tes tare 8 to 10mm in y l l a u s u s i y r t n u o c r u o n i n e m i c e p s e h t f o e z i s e h t ,t n e s e r p t A . s s e n k c i h t n i m m 5 . 0 o t 5 2 . 0 d n a r e t e m a i d

. s s e n k c i h t n i m m 5 . 0 d n a r e t e m a i d n i m m 0

1 Consideringt heuseofEDMt echnologyt omachinemicro

specimenslater ,therewli lbehea taffectinglayersandprocessing linesonthespecimens .So there , t s e t h c n u p l l a m s e h t f o s r o t c a f e c n e u l f n i e r o m y l e v i t a l e r o t e u D . s e c n a w o ll a g n i n i h c a m e b t s u m

t i l i b a i l e r e h t e r u s n e o t d e d e e n e r a s n e m i c e p s h g u o n

e y of the experiments .A tleas t3 pieces of

. y c n e i c i f f e g n i n i h c a m e h t e r u s n e o t d e v o m e r e l p m a s f o e c e i p h c a e m o r f t u o n e k a t e b n a c s n e m i c e p s

e n i h c a m g n i l p m a s e h t f o s s e n k c i h t g n i l p m a s m u m i n i m e h t t a h t d e r i u q e r y ll a r e n e g s i t i , e r o f e r e h T

d e e t n a r a u g e b d l u o h

s to be above 2-3mm (containing the heated cutting surface or mechanica l

e g a m a

d d part) .Increasetheuitlizaitonoft hemateria lremovedasmuchaspossible ,i tishopedtha t t

s u m e z i s g n i l p m a s e h t , n o i t i d d a n I . % 0 8 n a h t e r o m h c a e r n a c e t a r n o it a z i li t u e h

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e z i s e h t d n a , t n e m p i u q e e h t f o e c n a r a e p p a e h t , n e m i c e p s o r c i m e h t f o e p a h s d n a e z i s e h t o t g n i d r o c c a

.t n e m p i u q e e h t f o

.

b Principleand structure de isgn .Thereare two kinds offield sampilng machinesdeveloped s

a h c u s , t n e s e r p t a d a o r b

a EDMtypeand mechanica ltype .Takinginto accoun ttha ttheEDMtype

e h t e s u e w o s , d e t i m i l s i g n i l p m a s d l e i f e h t , g n o l s i g n i m u s n o c e m i t e h t d n a h g i h s i t s o c g n i l p m a s

r u d d e r e d i s n o c e b o t d e e n s t r a p g n i w o l l o f e h t , 1 e r u g i F m o r f e e s n a c e w s A . e p y t l a c i n a h c e

m ingthe

, e c i v e d g n i x i f , r e t t u c , e l d n i p s , s r o t o m c i r t c e l e : e n i h c a m g n il p m a s l a c i n a h c e m a f o t n e m p o l e v e d

d e d i v i d y l h g u o r e b n a c t I . g n i l p m a s r e t f a t n e m p i u q e g n i n i h c a m d n a s d o h t e m g n i l o o c , e p y t n o i t c e n n o c

c , m e t s y s n o i s s i m s n a r t , m e t s y s r e w o p : s m e t s y s x i s o t n

i uttingsystem ,coolingsystem ,contro lsystem

g u l p e h t s a h m e t s y s r e w o p e h T . m e t s y s d e x i f d n

a -int ypeandt hemobilepowert ype .

. d e t a c i l p m o c y l e v i t a l e r s i e n i h c a m g n i l p m a s e h t f o m e t s y s n o i s s i m s n a r t e h t d n a m e t s y s g n i tt u c e h T

s e d u l c n i m e t s y s g n i t t u c e h

T thehighspeedrotationofthecuttingtoo landthelowspeedrotationof

o w t f o n o i t o m n o i t i s o p r e p u s e h t f o y r o t c e j a r t e h T . n o it c e r i d h t p e d g n i l p m a s e h t g n o l a l o o t e h t

u f g n i t t u c r a l u g e r s t i t n e m e l p m i n a c e w t a h t o s , d e t a l u c l a c e b t s u m s n o i t o m t n e d n e p e d n

i nctiont hrough

d e e p s h g i h e h t g n i r u d n o it a r b i v e h t o t e u d d e c u d e r l l i w y t i li b a i l e r d n a y t i l i b a t s e h T . m e t s y s l o r t n o c e h t

m e t s y s g n i t t u c e h t f o n o i t c u d e r o t d a e l l l i w t I . s s e c o r p g n i t t u

c ’sl ife .Throught heanalysisandr esearch

h t , n o i t a c o l g n i l p m a s e h t f

o eoptima ldesignoft hemotionmechanismandt hel ife-spandesignoft he

e t i n i f h g u o r h T . m e t s y s n o it o m e l b a l l o r t n o c d n a e l b a i l e r , e l b i x e l f e h t e v e i h c a n a c e w , e r u t c u r t s n o i t o m

f o t n e m e v o r p m i d n a s i s y l a n a , s t s e t d l e i f f o r e b m u n e g r a l a d n a s i s y l a n a t n e m e l

e the stabiilty and

n o it o m e h t f o y ti l i b a t s e h t e v o r p m i n a c e w , m e t s y s g n it t u c e h t d n a m e t s y s n o i t o m e h t f o y t i l i b a i l e r

. m e t s y s g n i t t u c d n a m e t s y s

e h t f o r e t t u c e h t r o f n g i s e d g n il o o c e l b a n o s a e R . t a e h f o t o l a e t a r e n e g l l i w g n it t u c l a c i n a h c e M

n i h c a m g n i l p m a

s ei snecessaryt oavoidexcessivehea teffec tonequipmen tormaterial .Thesampling o s l a n a c , n o i t c n u f g n i t t u c e h t e z i l a e r n a c y l n o t o n , m e t s y s l o r t n o c d e c n a v d a e v a h d l u o h s e n i h c a m

a s l a i r e t a m t n e r e f f i d o t g n i d r o c c a y l p p u s t n a l o o c d n a d e e p s g n i t t u c t s u j d

a nd the change of the

n e k a t e b o s l a t s u m e r u t c u r t s e l o h w e h t f o e c n a l a b e h t d n a e r u t c u r t s h c a e f o s s e n f f i t s e h T . e r u t a r e p m e t

.t n u o c c a o t n i

c .Research and developmen to fspecia lcutitng parts .Thecomponentsof thefield sampilng d

n a s r o t o m s a h c u s e n i h c a

m spindlescan bepurchased .A tleast ,through reasonableselectionand

e h t n i r e t t u c e h T . e v e i h c a o t y s a e s i n o i t c n u f g n i y r r a c e h t , e r u t c u r t s e l o h w e h t f o n g i s e d l l a r e v o

. e l p o e p y b d e p o l e v e d e b o t s d e e n h c i h w t n e n o p m o c t n a t r o p m i t s o m e h t s i e n i h c a m g n i l p m a s

. e n i h c a m g n i l p m a s l a c i n a h c e m e h t f o n o i t c n u f d n a e r u t c u r t S . 3 e r u g i F

n i f o s t n e m e r i u q e r c i s a b e h t n o d e s a b s i e n i h c a m g n i l p m a s e h t f o t n e n o p m o c g n i l p m a s e h

T -service

e h t , t n e m p i u q

e hemispherica lcuttingtoolisusedasthecuttingtoo.lThehemisphericalcutitngtoo l

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e h t n o y d u t s o t y r a s s e c e n s i t i , y l t s r i F . c t e , n o i t a r b i v e h t y b d e s u a c s s e r t s e u g i t a f e h t , s s e r t s t c a p m i e h t

n o i t c e l e s l a i r e t a m , n g i s e d l o o

t ,strength design and vibration analysis .Secondly ,materia lhea t

g n i tt u c e h t f o e c a f r u s e h t , y l t s a L . l a i t n e s s e e r a l o o t g n i tt u c e h t f o y g o l o n h c e t g n i s s e c o r p d n a t n e m t a e r t

e r t c a p m i d n a e c n a t s i s e r r a e w e h t e v o r p m i o t n o it a r a p e r p e c a f r u s e h t y l p p a t s u m l o o

t sistanceofthe

h g i h f o s n o i t a n i b m o c t n e r e f f i d f o s i s y l a n a e f il d n a t s e t e c n a m r o f r e p e v i s n e h e r p m o c h g u o r h T . e c a f r u s

l a i r e t a m , e r u t c u r t s d e z i m it p o e h t e s o o h c o t g n it a o c t n a t s i s e r r a e w d n a l e e t s l o o t t n a t s i s e r r a e w h t g n e r t s

p o l e v e d o t n o i t a n i b m o c g n i t a o c d n

a thecutitngpartswtihhighperformance.

g n i d n i r g f o n g i s e d e p a h s e h t s i t n a t r o p m i t s o m e h t , s t r a p g n it t u c f o t n e m p o l e v e d d n a h c r a e s e r e h t n I

e h t d n a s l o o t g n i t t u c f o y g o l o n h c e t g n i r u t c a f u n a m e h t , s l o o t g n i t t u c f o n g i s e d h t g n e r t s e h t , s l o o t

. g n i t a o c e v i s a r b a f o y g o l o n h c e t

d .Samplee quivalenceveriifca itona tfers ampilng .Atlhought herei snoparticularchangei nt he o

r c i

m -structureandmacro-mechanica lpropertiesoft hesample ,butt hemicro-specimeni sverysmal l v

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a erification after

d e m r o f r e p e b l l i w t s e t g n i g l u b c i l u a r d y h a r o t s e t h c n u p l l a m s A . t n u o c c a o t n i n e k a t e b t s u m g n i l p m a s

l a c i n a h c e m e h t n o g n i t t u c f o e c n e u l f n i e h t d n a , l a i r e t a m k l u b e h t d n a e l p m a s d e v o m e r e h t n o

e n i m a x e e b d l u o h s l a i r e t a m e h t f o s e i t r e p o r

p d .The curved surfaces of differen tstructures are

e m a s e h t t A . k l u b d n a g n il p m a s e h t f o s e i t r e p o r p l a c i n a h c e m e h t n o d e r a p m o c d n a d e l p m a s y l e t a r a p e s

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= H , m m 3 3 = L e k a t y l l a it i n i , n o i t a r e p o e h t f o y t i li b a i l e r d n a y t e f a s e h t e s a e r c n i d n a l o o t e h t f o e z i s

t a p e h t s e t e l p m o c l o o t g n i t t u c e h t f o e d a l b e h T . m m 0 3 = R d e n i a t b o e b n a c h c i h w , m m

5 h shownin

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t 69.7o .The overal lrotation ofthe too lis 69.7o ,which isalmos t

n O . m s i n a h c e m e h t f o s t r a p r e h t o y b d e n i a r t s n o c s i t i e s u a c e b e r u t c u r t s e h t n i e v e i h c a o t e l b i s s o p m i

e n i l l i w r e n r o c e g r a l a h c u s , d n a h r e h t o e h

t vitablyleadtoanoversizedcutter .Inordertoreducethe

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y r o t c e j a r t g n i tt u c e h t h t i w l l e w h c t a m t s u m t r a p t n e u q e s b u s s t i d n a l o o t e h t f o e g d e g n i t t u c e h T

l a n o it c i r f l a n o i t i d d a d n a e c n e r e f r e t n i e c u d e r , y c n e i c i f f e g n i t t u c e v o r p m i o t 4 e r u g i F n i n w o h s

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n o i t o m g n it t u c e h t t r o p p u s o t s s e n f f i t s d n a h t g n e r t s t n e i c i f f u s n i a t n i a m t s u m s t r a p r e h t O . e l b i s s o p s a

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s l o o t g n i t t u c d e n g i s e D . 5 e r u g i

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e r e w s l o o t f o s e p y t o w t , s r e t e m a r a p g n it t u c e h t e n i m r e t e d d n a t c e f f e g n i t t u c e h t t s e t o t r e d r o n I

. 5 e r u g i F n i n w o h s s l o o t 2 . o N d n a 1 . o N e h t s a h c u s , d e n g i s e d y l i r a n i m i l e r p

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n o i ti s o p e d r o p a v l a c i s y h p a n i d e c a l p s i l o o t e h t , l o o t d e h s i n i f e h t f o g n i n a e l c c i n o s a r t l u r e t f A

r a e w a s a e g d e e d a l b e h t n o d e m r o f s i m l i f N i T a d n a , s u t a r a p p a g n i t a l p n o i c r a e d o h t a

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F shows the interface image of a mulitlayer coating substrate observed under scanning , y z z u f s i e t a r t s b u s g n it a o c e h t f o e c a f r e t n i e h t t a h t e r u g i f e h t m o r f n e e s e b n a c t I . y p o c s o r c i m n o r t c e l e

. d o o g s i e c r o f g n i d n o b e h t t a h t g n i t a c i d n i

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d e t c e l f e d s i l o o t e r i t n e e h t , e m i t e m a s e h t t A . g n i t t u c d e e p s h g i h e v e i h c a o t m p r 0 0 0 , 2 1 t a t e s y l l a i t i n i s i

d n a e g d e g n i t t u c e h t f o e p a h s e h t t a h t s e r i u q e r s i h T . 4 . g i F n i n w o h s y r o t c e j a r t e h t g n o l a d e v o m d n a

c e b d l u o h s l o o t g n i t t u c e h t f o d n e t n o r

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l a c i r e h p s a e b d n a e n i l y r o t c e j a r t e h t h t i w t n e t s i s n o c e b d l u o h s l o o t g n i t t u c e h t f o n o it r o p g n i t t u c

l a b e h t p e e k t s u m r e tt u c e h t , s s e c o r p d e e f e h t g n i r u D : s i t n i o p t n a t r o p m i e r o m e h T . e r u t c u r t

s lcenter

s i l l a b e h t f o r e t n e c e h t f o n o i t i s o p e h t t a h t e r u s n e o t s d e e n m s i n a h c e m d e e f e h t f o n g i s e d e h T . d e x i f

. s m s i n a h c e m g n i t a r e p o l a i c e p s r e d i s n o c o t s d e e n t i d n a d e x i f

n e c e h t p e e k n a c t a h t s n o i t u l o s f o s d n i k o w t , n o i s s u c s i d m a r g o r p d n a s i s y l a n a r e t f

A terofthetoo l

. 7 e r u g i F n i n w o h s s a , d e n i a t b o e r a d e x i f r e t n e c

m s i n a h c e m g n i r e t n e c e p y t m r a g n i w S ) b ( m s i n a h c e m g n i r e t n e c e p y t l i a r e d i u G ) a (

m s i n a h c e m g n i r e t n e c d e e f g n i t t u C . 7 e r u g i

F .

g n i r e t n e c e p y t li a r e d i u g e h t n

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s t n e m e v o m r a l u c r i c e k a m e n i h c a m r e w o p e h t d n a l o o t e h t , d n a h r e h t o e h t n O . g n i t t u c m r o f r e p o t e t a t o r

s i r e t n e c l o o t e h t t a h t e r u s n e o t s a o s 2 d n a 1 s r e d i l s e h t h g u o r h t s l i a r e d i u g e h t g n o l

a fixed .In the

e h t e t e l p m o c o t s i x a n o i t a t o r e h t d n u o r a s g n i w s m r a g n i w s e h t , m s i n a h c e m g n i r e t n e c e p y t m r a g n i w s

e r a d n a s s e c o r p n g i s e d e h t d e t e l p m o c e v a h s e p y t h t o B . d e x i f r e t n e c l o o t e h t g n i p e e k , n o i t o m d e e f

. g n i r u t c a f u n a m r e d n u

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(7)

s n o is u l c n o C

e g a t s l a i t i n i e h t n I . s k s a t h c r a e s e r l l a f o s t r a p l a c i t i r c t s o m e h t e r a n g i s e d l o o t d n a m s i n a h c e m g n i t t u C

d e t r a t s g n i h t y r e v e , s l a i r e t a m e c n e r e f e r f o k c a l e h t o t e u d , n o it a t n e m e l p m i n o i s s i m f

o fromscratchand

y l e m i t a n i e d a m e r e w s n a l p d n a s t n e m t s u j d a , y l e t a n u t r o F . s e l b u o r t t l u c i f f i d l a r e v e s o t t n o r f e r e w e w

n g i s e d e h t s a l l e w s a , s e i d u t s g n i t a o c e d a l b l o o t d n a , n g i s e d l o o t , s e i d u t s y r o t c e j a r t l o o t d n a , r e n n a m

c d e e f g n it t u c e h t f o g n i w a r d d n

a enteringmechanismweresuccessfullycompleted.

s t n e m g d e l w o n k c A

The presen twork has been supported by the China Nationa lQuailty Infrastructure (NQI) No . a n i h C , n i L g n i q u h S . r D o t e d u t i t a r g r i e h t s s e r p x e o t e k i l d l u o w s r o h t u a e h T . 0 0 0 3 0 2 0 F F Y 6 1 0 2

E l a i c e p

S quipmen tInspection andResearch Institute ,Bejiing ,China ,forhisconstan tattentionand .t

n e m e g a r u o c n e

s e c n e r e f e R

] 1

[ M.A .Haque ,H.D .Espinsoa ,and H.J .Lee ,MEMS forIn Situ Testing—Handling ,Actuation , .

0 1 0 2 , s t n e m e r u s a e M t n e m e c a l p s i D d n a , g n i d a o L

] 2

References

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