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Structure and Non Equilibrium Phase Diagram of the Co Sputtered and Post Annealed Fe ZnO System

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Figure

Fig. 1X-ray diffraction patterns of (Zn1�xFex)O films on ð0112�Þ sapphiresubstrate at 673 K for different Fe concentrations.
Fig. 3Electron micrograph (a) and electron diffraction pattern (b) of a planview of a (Zn1�xFex)O film of x ¼ 0:2 deposited at the substratetemperature of 673 K.
Fig. 6Shows an electron diffraction pattern (a) and an image (b) of a plan-view of a film sputtered on the ð0112�Þ sapphire substrate at 873 K.
Fig. 8Phase diagram of the ZnO-Fe system determined from X-raydiffraction and EDS analysis using samples prepared by co-sputteringunder a base pressure of 10�5–10�6 Torr and a growth rate of 0.3 nm/s.
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