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OXIDATION OF SILICON - THE VLSI GATE DIELECTRIC

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Figure

Figure 2. whose area corresponds A schematic diagram of the progress of oxidation. A column to one Si atom at the interface is shown before and after oxidation by one oxygen molecule
Figure 4. surface imaged and contrast atoms The STM image of the reconstructed Si(l11) at -2 V where variations in LWS are small is dominated by the atomic corrugations of Si in the surface
Figure 5. and oxidation showing Top are empty state images of the reconstructed Si(ll1) surface before (left) after (right) submonolayer oxidation
Figure 6. the exposure during tunnelling by STM filled states images of the reconstructed Si(100) surface taken before (left) and after (right) submonolayer oxidation
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