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Design And Fabrication Of Thin-Film Optical Filters For Mid-Infrared Spectroscopy Application

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Figure

Figure 1: (a) Schematic of an FPI. M1 and mirrors; d is the distance between the mirrors;of incident light, and θ is the phase shift at reflection
Figure 2: Reflectance with different number of stack layers. As depicted in the figure 2, the higher the stack layers, the higher
Figure 5: Mirror structure
Table 2. Comparison of the simulation and the final design results
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