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Enhancement of the Homogeneity of Micro Slits Prepared by Wire Electrochemical Micromachining

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Figure

Figure 1.  Schematic diagram of WEMM in this experiment
Figure 2. Experimental setup
Figure 4.   Effect of the anode vibration frequency on the side gap (anode vibration amplitude: 5 µm, cathode travelling frequency: 2 Hz, cathode travelling amplitude: 70 µm)
Figure 5.   Effect of the anode vibration amplitude on the side gap (anode vibration frequency: 100 Hz, cathode travelling frequency: 2 Hz, cathode travelling amplitude: 70 µm)
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