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A simple but precise method for quantitative measurement of the quality of the laser focus in a scanning optical microscope

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Academic year: 2019

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Figure

Fig. 1. A Leica SP-5 scanning system (not pictured) directed the scannedradiation to the objective lens
Fig. 2. (A) A grey-scale laser scanning reflection image of a TEM grid with a 40 μm diameter hole, imaged at 488 nm using the 5x/0.15 N.A
Fig. 3. Experimental data of the evolution of the beam radius for the (A) 5x/0.15 N.A., (B) 10x/0.4 N.A., (C) 40x/0.75 N.A., and (D) 40x/1.3 N.A

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