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Influence of Abrasive Shape on the Abrasion and Phase Transformation of Monocrystalline Silicon

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Figure

Table 1. Parameters of abrasive particle with different semi-axes a, b and c along x-, y- and z-directions, respectively
Figure 3. Displacement of the upper specimen along y-[010] direction vs. time and axial ratio
Figure 4. Angular velocity of abrasive center-of-mass vs. time at different abrasive axial ratio
Figure 5. Friction coefficient (μ) and e/h value vs. simulated time at different axial ratio
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