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Back-end-of-the-line MEMS switches for power management, ESD and security

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Figure

Table I.    C. Pull-In voltage analysis
Fig. 5: Simulated pull-in voltage for Pt, W, Al, Fe and Cu  bridges as a function of gap
Fig. 8: Elastic and magnetostatic components of the force vs  displacement for the magnetized switch
Fig. 13. Error! Reference source not found. The measured
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