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Self organizing nanodot structures on InP surfaces evolving under low energy ion irradiation: analysis of morphology and composition

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Figure

Figure 1 AFM topographic images of InP surfaces bombarded by 1.9 keV Ar+ ions at normal incidence and an ion flux f = 1.5 × 1014cm−2 s−1 with fluences of (a) 0.5, (b) 1, (c) 2, and (d) 3 × 1018 ions cm−2
Figure 2 The mean radius r (a), height h (b), and separation (wavelength) l (c) of the dots plotted as a function of the ion fluence Φ.The error bars given in the plots represent the widths of the distributions of the respective values
Figure 3 AFM topographic images of InP surfaces bombarded by 1.9 keV Ar+ ions at normal incidence and an ion fluences of 1 × 1018ions cm−2 with ion fluxes of (a) 0.4, (b) 1.1, (c) 1.5, and (d) 2.1 × 1014 cm−2 s−1
Figure 4 The mean radiusplots represent the widths of the distributions of the respectivevalues
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