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Broadband transitions for membrane-based coplanar waveguides on highly-conductive silicon substrates

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Figure

Fig. 1.Fig. 1.Fig. 1. Cross-sectional view of CPW built in membrane technology. Cross-sectional view of CPW built in membrane technology
Fig. 4.Fig. 4. Cross-sectional view of interconnect segment on silicon (sil-icon access line).Fig

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