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Dynamic Characterization of Microcantilevers with a Shock Wave Excitation Method under High Temperature

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Figure

Fig. 1.  Exploded views of excitation device
Fig. 3.  SEM photos of microcantilevers. a) #1, b) #2
Fig. 5.  Vibration response signal of Microcantileva #1
Fig. 11.  Normalized natural frequencies of microcantilevers as functions of temperature

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