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Impedance model for a high-temperature ceramic humidity sensor

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Figure

Figure 1. Optical micrograph of the sensor. The size of the sensorelement is 2 mm × 2.3 mm
Figure 2. Magnitude of the sensor at room temperature in dry air.The outlier represents 50 Hz noise.
Figure 5. Bode diagram of the sensor at different relative humid-ity levels at elevated temperature
Figure 6. Proposed equivalent electrical circuit for humidity sens-ing in a broad temperature range
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