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Composition Analysis of III Nitrides at the Nanometer Scale: Comparison of Energy Dispersive X ray Spectroscopy and Atom Probe Tomography

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Figure

Fig. 1 HAADF-STEM image taken along the [11-20] zone axisshowing one period of the multilayer stack with a scheme of thestack given in the inset
Fig. 2 EDX analysis at different positions along the growth axis: close to the GaN buffer ((left), zoom on four periods at an intermediate positionmiddle), and at the top part (right)
Fig. 3 APT analysis. a 3D reconstruction of the sample tip evaporated including seven periods of the stack
Fig. 4 a Variation of the Ga++/Ga+ ratio during the evaporation ofthe volume shown in Fig

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