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Error Analysis of Radial Motion Measurement of Ultra Precision Spindle

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Figure

Figure 1. Nonlinearity of a capacitive sensor induced by lateral offset relative to a spherical artifact
Figure 3. General misalignment between the probe and the artifact.
Figure 4. Illustration of positioning error of Donaldson reversal method. (a) Positioning error of artifact ball; (b) Positioning error of probe
Figure 5. Angular positioning error of multi-position (a) and three-probe methods (b)

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