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Contact Material Optimization and Contact Physics in Metal-contact Microelectromechanical Systems (MEMS) Switches

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Figure

FIG. 1: RF MEMS switch market forecast [11]
Table 1: Performance comparison of FETs, PIN Diode and RF MEMS Electrostatic Switches [6]
FIG. 9: Contact resistance evolution for Au contacts against Au-Ni (20%) alloy contacts
FIG. 10: Analysis of failed upper gold contacts (against Au-Ni 20 at. %) after the failure
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