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A Rotating Tip Based Mechanical Nano Manufacturing Process: Nanomilling

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Figure

Fig. 1 Two fundamental rotational motions of the tip: a In-planemotion, and b Out-of-plane motion
Fig. 3 SEM images of the channels created using different nanotoolmotions. The long and curled chips observed for the cases withnanotool motions indicate that the material removal mechanism isshearing dominated
Fig. 5 An AFM image and cross-section topography of four channelswith different widths, each created in a single pass using the circularin-plane motions with increasing diameter (chips around the createdfeatures are cleaned prior to imaging)

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