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Effect of Thickness on Properties of Copper Thin Films Growth on Glass by DC Planar Magnetron Sputtering

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Figure

Table 1. Deposition condition for the Cu thin films. --------------------------------------------------------------------
Table 2. Mean grain size of Cu thin films deposited on glass substrate.
Fig. 3. Three-dimensional AFM images of Cu thin films: (a) 50, (b) 90, (c) 160 and (d) 220 nm
Fig. 4. Grain size of the Cu thin films deposited in different thickness.
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