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Porous NASICON Type Li3Fe2(PO4)3 Thin Film Deposited by RF Sputtering as Cathode Material for Li Ion Microbatteries

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Figure

Fig. 1 XRD patterns of samples a LiFePO4 target, b as-deposited Li3Fe2(PO4)3, and c annealed Li3Fe2(PO4)3 at 700 °C for 3 h
Fig. 2 a as-deposited Li3Fe2(PO4)3 with b profilometry analysis, low (c) and high magnification (d) SEM images of porous Li3Fe2(PO4)3 depositedby RF sputtering after annealing treatment
Fig. 4 Battery cycling tests at the kinetic rate of C/10 in the potential window of 2–4 V (a)

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