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Performance of Nano Submicron Stripe Pd Thin Film Temperature Sensors

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Figure

Fig. 1 SEM micrographs of the nano-submicron-stripe dual-beam Pd temperature sensors and an onsite Cr/Pd control sensor
Fig. 2 Measurement results of dual-beam Pd sensors and calibrationscale. Thedata. Theresults with on-site Pd thermocouples
Table 1 Comparison between the calculated ΔS values and measured ΔS values of submicron Pd temperature sensors
Figure 6b plots the raw output voltage data of sensor 1
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