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Highly flexible method for the fabrication of photonic crystal slabs based on the selective formation of porous silicon

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Figure

Figure 1 Schematics of vacancy distribution at 2.4-μm depthafter proton beam irradiations on Si surface.
Figure 3 Photonic band structures corresponding to a square lattice of cylindrical air holes in a Si matrix
Table 2 Experimental ratios (h/a) for the differentcombinations of proton fluence and applied currentdensity (J)
Figure 7 Computed frequency ranges of the photonic gaps for different line fluences and current densities

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